Slim tool-top package
The low cabinet profile limits intrusion into compact equipment and mini-environment service zones.
This 2 x 4 equipment fan filter unit uses a 575 x 1175 mm footprint and a slim 110 + 35 mm cabinet arrangement. It provides the highest listed static pressure in the three-model EFU group at 360 Pa, while retaining the lowest 60-95 W power band. A 50 mm H14 filter supports direct integration into semiconductor stockers and narrow tool enclosures.
The low cabinet profile limits intrusion into compact equipment and mini-environment service zones.
The 360 Pa value gives this size the greatest resistance capability in the accepted EFU group.
A listed 60-95 W range supports efficient localized clean-air supply.
| Nominal Format | 2 x 4 |
|---|---|
| Footprint | 575 x 1175 mm |
| Cabinet Height | 110 + 35 mm |
| Static Pressure | 360 Pa |
| Power Input | 60-95 W |
| Sound Level | 44-48 dBA |
| Final Filter | H14, 50 mm |
| Installation | Equipment-roof or mini-environment mounting |
| Airflow Direction | Filtered supply into the tool enclosure |
| カスタマイズ | 意図したアプリケーションと動作環境に基づいて利用できます。 |
Designed for semiconductor stockers, compact tool enclosures and narrow mini-environments that need pressure reserve in a shallow package. Final duty should be confirmed against tool resistance and leakage.
Confirm electrical supply, speed control, H14 seal, equipment opening and service direction. The final fan setting should reflect actual tool resistance.
寸法、設置条件、性能目標、必要な表面仕上げをお送りください。