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Geometry follows the tool
Custom flange and outlet shapes let equipment designers place filtration beside the process rather than adapting the machine around a ceiling tile.
FFU およびターミナル空気浄化装置
機器ファンフィルターユニット （ EFU ）
A compact fan-and-filter assembly for equipment builders who need a defined clean-air outlet, mounting pattern and electrical interface inside a process tool.
- Tool-Specific Footprint
- Flanged Equipment Mounting
- Compact EC Fan Layout
- HEPA or ULPA Options
商品紹介
The equipment fan filter unit places the air-moving and final-filtration components inside or directly on a production tool. Its enclosure can follow a rectangular bay, an elongated opening or another defined machine interface rather than the grid of a room ceiling. The illustrated version uses a row of fans above a narrow filter face, with a flanged metal body and an end-mounted connector. Housing material, outlet direction, attachment holes and service access can be arranged around the equipment architecture.
主要な特徴
Defined attachment points
A planned hole pattern avoids drilling into the assembled filtration section during equipment installation.
Distributed fan layout
Multiple fan positions can serve an elongated filter face where one central inlet would complicate the available space.
Machine-interface choices
Power, command and fault connections can be arranged for the tool's wiring route and maintenance access.
アプリケーションのソリューション
Successful EFU integration depends on the space, return path and service needs of the individual machine.
A standard module blocks an access door or cable route.Locate the inlet, flange and connector from the tool drawing and reserve the full service envelope before freezing the enclosure.
A long outlet has uneven delivery around internal obstructions.Select the fan positions and plenum layout against the usable filter area and check the airflow in the assembled tool.
The control interface cannot report a fan fault to the machine.Specify the enable, feedback and alarm signals with the tool controller instead of selecting a connector only by its shape.
Filter replacement would require dismantling process equipment.Choose a withdrawal direction and removable retention arrangement that remain accessible after guards and transport mechanisms are installed.
典型的な用途
Wafer processing equipmentFlat-panel display toolsLithium battery production machinesSMT and electronics enclosuresPrecision optical inspection systems
技術的なパラメータ
Common component options and machine-interface details support selection of a narrow equipment module rather than a ceiling-grid FFU.
| Equipment Interface Format | Elongated rectangular module with a tool-specific length, width and flanged mounting pattern |
|---|---|
| Common Mini-Pleat Filter Depth Options | 30, 50 or 70 mm filter packs; overall module depth includes the separate fan chamber and mounting structure |
| Housing Material Options | Aluminium alloy, stainless steel or metallic-coated steel |
| ファン配置 | Compact EC fan assembly; distributed-fan layout along the narrow outlet |
| Common Mains Supply Options | 220–240 V AC, single phase, with a 50 Hz or 60 Hz electrical variant |
| Final-Filter Options | Mini-pleat HEPA H13/H14 or process-selected ULPA filter |
| 取付インターフェース | Bolted equipment flange with tool-specific hole pattern and perimeter gasket |
| Control Options | Local speed adjustment, analogue control or RS-485/Modbus interface with the matching controller |
| Service Configuration | Removable filter cassette and access direction arranged around the machine frame |
| カスタマイズ | 意図したアプリケーションと動作環境に基づいて利用できます。 |
利用可能なオプション
Narrow-strip or rectangular enclosureTop, side or downward outlet arrangementHEPA or ULPA final-filter selectionLocal, analogue or networked control packageAlternative flange, connector and service access
Select the complete fan/filter stack and interface combination. A reduced housing depth does not mean every filter thickness or airflow duty fits the same envelope.
Selection and Installation
Start with the machine envelope
Define the required outlet area and the space available inside the process tool, including the actual opening, mounting datum, connector keep-out area and filter-removal direction. A long narrow strip, such as the illustrated arrangement, needs a different fan layout from a square module. Module depth must include the filter, fan, support flange and connector projection rather than only the bare fan housing.
Define the clean zone and return route
Specify the usable outlet area, downstream obstructions and the path for displaced air to leave the enclosure. Air velocity at the filter face is not automatically the velocity at a wafer, camera or transport stage. Select the fan against the resistance of the complete tool airflow path, and review airflow uniformity, power and sound at the same operating point.
Make the electrical handoff unambiguous
Choose the actual supply variant and identify which power conversion, controller and cables are included. An EC motor does not necessarily accept low-voltage DC at the equipment connector. Define pinout, enable signal, speed command, feedback and fault behavior together; a Modbus option needs the matching register map and communication settings.
Protect precision mechanisms during service
Provide clearance to withdraw the filter without scraping media against the tool frame. Use the selected gasket compression and support method, and evaluate vibration at the machine mounting points rather than assuming a fan-type label guarantees stage stability. This clean-air module is not a solvent exhaust, dust collector or containment device. Where the task is room-level filtration rather than tool integration, compare the fan-powered HEPA ceiling module.
Planning a Equipment Fan Filter Unit (EFU) specification?
寸法、設置条件、性能目標、必要な表面仕上げをお送りください。
