STjh semiconductor EFEM mini-environment with three carrier load ports and atmospheric robot enclosure

STJH-SEMICONDUCTOR-MINI-ENVIRONMENT-3PORT

Semiconductor Mini-Environment Three-Load-Port

A medium-throughput three-port EFEM adding a queued carrier position without moving to the largest front-end width.

Three carrier load ports
Additional queued carrier position
Manual, AGV or OHT loading

商品紹介

The three-load-port arrangement adds a carrier buffer beyond a basic two-port front end while retaining one localized ultra-clean robotic transfer zone. An atmospheric robot and aligner manage wafers between carriers and the process tool. Ports can be served manually or by AGV/OHT automation, making this layout suitable for medium-throughput equipment.

主要な特徴

Improved carrier buffering

The third port allows another lot to queue while source and destination positions remain active.

Automation flexibility

The port face can support manual carts or factory AGV/OHT delivery.

Localized clean transfer

Filtered mini-environment airflow protects wafers during alignment and atmospheric robot moves.

技術的なパラメータ

Load Ports	Three
Environment	Localized positive ultra-clean zone
Wafer Handling	Atmospheric robot
Aligner	Integrated
Carrier Interface	SEMI-compatible
Loading Modes	Manual, AGV or OHT
Buffer Capacity	One additional queued carrier over two-port layout
Transfer Direction	Horizontal robotic
Typical Throughput	Medium tool-front staging
カスタマイズ	意図したアプリケーションと動作環境に基づいて利用できます。

Applications

For medium-throughput wafer tools that benefit from an extra queued FOUP. Factory transport interface and robot scheduling should be resolved before freezing port spacing.

Solutions for Your Application

Two load ports leave no carrier ready while one lot is processing.Use the third port as a queued or destination position.

Automated material handling cannot align with a manually oriented front end.Configure port height and interfaces for AGV or OHT delivery.

利用可能なオプション

Choose carrier ID, ionizers, aligner, automation type, robot reach and port pitch. Tool communication can be integrated with the factory control scheme.

Planning a Semiconductor Mini-Environment Three-Load-Port specification?

寸法、設置条件、性能目標、必要な表面仕上げをお送りください。

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