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FFU およびターミナル空気浄化装置
AMC 化学フィルター FFU
A fan filter assembly combining target-specific molecular media with a separate particulate stage for contamination-sensitive process air.
- Target-Specific Molecular Media
- Separate Particulate Stage
- Removable Media Cassette
- Independent Filter Servicing
商品紹介
The AMC chemical filter FFU adds a removable molecular-media cassette to a fan and final-filter assembly. The chemical stage addresses selected airborne compounds by adsorption or chemisorption, while the separate downstream particulate filter serves a different function. The cassette arrangement allows the gas-phase media to be replaced without treating both stages as a single consumable. Adsorbent chemistry, media depth and process compatibility are selected for the identified contamination profile, rather than assuming one carbon panel handles every gas.
主要な特徴
The final particulate stage remains distinct from molecular adsorption.
Cassette withdrawal provides a defined replacement route for spent adsorbent.
Separate consumables allow chemical and particulate maintenance to follow different criteria.
アプリケーションのソリューション
An acceptable particle count can coexist with a molecular-contamination problem.
Process-sensitive vapours pass through a particle-only filter system.Add media selected for those compounds rather than increasing the particulate-filter class and expecting gas removal.
The chosen carbon medium does not suit the actual contaminant.Use compound-specific adsorption or chemisorption data to select the medium, including the effect of competing gases.
Chemical-media exhaustion is missed during ordinary filter checks.Track exposure and downstream breakthrough separately from the particulate filter's airflow-resistance checks.
A media change causes unnecessary disposal of the final filter.Use the separate service paths and replace each stage according to its own condition and change-out plan.
典型的な用途
Semiconductor cleanroom recirculationReticle and wafer storage environmentsProcess-tool mini-environmentsContamination-sensitive metrology areas
Application suitability depends on the compounds present, the selected media and the required downstream concentration.
技術的なパラメータ
Common reference choices for the molecular cassette, particulate stage and powered module.
| Filtration Arrangement | Target-specific molecular cassette upstream of a separate HEPA or ULPA final filter |
|---|---|
| Common Molecular-Panel Face Sizes | 600 × 600 or 600 × 1200 mm; 610 × 610 or 610 × 1220 mm format options |
| Molecular-Cassette Depth Options | Common compact-panel choices: 50, 90 or 150 mm |
| Adsorbent Options | Activated carbon for selected organic vapours; impregnated carbon for selected acid or base gases; combined-media cartridges for a defined mixture |
| Cassette Frame and Seal Options | Anodized aluminium frame with EPDM or polyurethane perimeter gasket |
| Final-Filter Configuration | Separate mini-pleat particulate stage with gasketed or gel-seal mounting options |
| Common Fan Supply Options | 120 V AC, 60 Hz; or 220–240 V AC, 50/60 Hz, single phase, with a matching motor version |
| Fan-Control Options | Stepped AC drive or variable-speed EC drive serving the combined filter path |
| Service Arrangement | Withdrawable chemical cassette and independently replaceable particulate filter |
| カスタマイズ | 意図したアプリケーションと動作環境に基づいて利用できます。 |
利用可能なオプション
Adsorbent formulation for identified gases or vapoursSingle-media or combined-media cassetteHEPA or ULPA particulate stageGas-sampling connections and filter-pressure monitoring
Gas sampling and pressure monitoring answer different questions; neither is an automatic indication that the adsorbent remains effective.
Selection and Installation
Start with the contamination profile
Identify the compounds of concern, their typical and peak concentrations, the permissible downstream level and the source of exposure. Include airflow, temperature, humidity and continuous or intermittent operation. A request for general VOC removal is not a complete media specification: different vapours and gas mixtures can require different adsorbents.
Evaluate capacity as well as initial removal
Compare media performance using the relevant compounds and operating conditions. A high initial removal percentage does not establish useful service life, and a particle-efficiency rating says nothing about gas adsorption. Chemical-media replacement should follow an exposure and breakthrough-monitoring plan; differential pressure alone does not indicate remaining adsorption capacity.
Size the fan for the combined air path
Include both filter stages and the installation's upstream pressure when selecting the operating point. Define the particulate-filter class separately from the molecular requirement, and request air volume, input power and noise for the selected assembly. Reserve space to withdraw the chemical cassette without damaging the final-filter seal or exposing its media.
Match monitoring to the actual risk
Select sampling locations and an analytical method able to detect the target compounds at the required concentration. This cleanroom supply module is not a fume hood, emergency gas scrubber or universal protection against hazardous vapours. Processes that release hazardous substances require their own assessed containment and exhaust system.
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