STjh wide semiconductor EFEM mini-environment with four load ports, carrier sensors and ionizer bars

STJH-SEMICONDUCTOR-MINI-ENVIRONMENT-4PORT

Semiconductor Mini-Environment Four-Load-Port

The largest cited EFEM load-port configuration for maximum FOUP staging at high-throughput process tools.

Four carrier load ports
Maximum series buffering
Carrier ID and ionizer options

Введение продукции

This four-port EFEM provides the greatest carrier-buffer capacity in the series. The positive-pressure ultra-clean front end supports carriers holding up to 25 wafers on the cited platform and can add carrier identification or ionizers. Its wider port face suits high-throughput tools where queue availability outweighs floor-space constraints.

Основные характеристики

High-throughput staging

Four ports maintain multiple source, destination and queued carriers at the tool front.

Carrier traceability option

Identification hardware can associate incoming carriers with the automation sequence.

Static-control option

Ionizers can reduce charge around open-carrier and wafer-transfer areas.

Технические параметры

Load Ports	Four
Environment	Positive-pressure ultra-clean mini-environment
Carrier Capacity	Up to 25 wafers per carrier on cited platform
Wafer Handling	Atmospheric robotic transfer
Carrier Interface	SEMI-compatible
Buffering	Maximum four-port arrangement
Carrier Identification	Optional
Ionization	Optional
Typical Use	High-throughput process-tool front end
Customization	Доступно в зависимости от предполагаемого применения и операционной среды.

Applications

For high-throughput semiconductor tools requiring maximum FOUP staging. Confirm port spacing, factory-automation clearance and robot cycle logic within the expanded front-end width.

Solutions for Your Application

Carrier delivery delays leave the process tool waiting for the next lot.Use four ports to increase queued source and destination capacity.

More staged carriers complicate identity and static control.Add carrier identification and ionization suited to the automation plan.

Доступные варианты

Configure load ports, carrier ID, ionizers, aligner, robot, AGV/OHT interfaces and tool controls. Final front-end width follows port pitch and service clearances.

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