FOUP 운송 카트
- Three-point locator sets position each 300 mm FOUP consistently on the shelf
- Static-dissipative mats and grounding options support charge-controlled handling
- Raised three-sided ledges keep carriers inside the cart footprint during movement
상품 소개
The FOUP transport cart provides dedicated manual mobility for closed 300 mm wafer carriers between semiconductor process and storage points. Each solid stainless shelf holds a replaceable static-dissipative mat and a three-pin locator pattern aligned to the carrier base. Three raised shelf edges protect the load envelope, while the open front supports direct placement and retrieval. The welded frame, integrated handle and conductive rolling hardware are selected for controlled cleanroom movement.
주요 기능
Three locator pins on each shelf establish repeatable carrier orientation.
Dark ESD mats cushion the base and provide a controlled contact surface.
Raised rear and side ledges resist carrier migration without obstructing front loading.
Conductive casters and a grounding chain provide configurable charge-dissipation paths.
응용 프로그램 솔루션
Generic carts do not positively locate FOUP bases, allow carriers to shift during turns and may accumulate charge beneath sensitive wafer enclosures.
일반적인 응용 프로그램
기술 매개변수
Locator-pin coordinates must match the target FOUP bottom interface so the carrier rests on its intended support features rather than on the shell. Shelf stiffness, mat thickness and ledge clearance are chosen around loaded mass and operator access. The stainless frame transfers shelf loads to four corner casters; grounding continuity between shelves, frame and rolling hardware is verified for the supplied configuration.
| 핵심 재료 | 304 or 316L stainless steel frame with static-dissipative polymer shelf mats |
|---|---|
| 패널 두께 | 1.2–2.0 mm solid stainless shelf pans |
| 유효 폭 | 420–650 mm usable shelf width |
| 최대 길이 | Up to 900 mm overall cart length |
| 강철 면면 두께 | 1. 2 - 2. 0 mm 노출된 스테인레스 선반 표면 |
| 코어 밀도 | 7900 - 8000 kg / m 3 명칭 스테인레스 강철 밀도 |
| 열전도도 (Thermal Conductivity) | 약 14. 6 - 16. 2 W / (m · K) 실온에서 |
| 표면 마무리 | Fine-brushed or electropolished stainless steel with removable textured ESD mats |
| 접합 유형 | Continuously welded square-tube frame with retained solid shelves, three-point locator sets and swivel casters |
| 사용자 정의 | 의도된 응용 프로그램 및 운영 환경에 따라 사용할 수 있습니다. |
사용 가능한 옵션
Planning a FOUP Transport Cart specification?
치수, 설치 조건, 성능 목표 및 필요한 표면 마감을 보내십시오.

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