Three-quarter view of ePTFE membrane ULPA filter for semiconductor cleanrooms

エアフィルターと化学ろ過

ePTFE 膜 ULPA フィルター

An ultra-clean ePTFE membrane panel offering U15 or U16 efficiency options, low pressure drop and reduced ionic or fibre emissions for semiconductor processes.

U15–U16 ePTFE Media
Boron-Free Filtration Layer
低圧力損失
低アウトガス建設

見積もりリクエスト製品案内

商品紹介

The ePTFE membrane ULPA filter uses an expanded-polytetrafluoroethylene membrane laminated to a stable support and formed into closely controlled mini-pleats. The non-borosilicate filtration layer reduces fibre shedding and avoids boron from conventional glass media, while the thin membrane structure can deliver lower resistance at ultra-high efficiency. Low-outgassing separators and polyurethane potting secure the pack in an anodized-aluminium frame. Gel, gasket or knife-edge versions integrate with semiconductor cleanroom ceilings, fan filter units and process-tool mini-environments.

主要な特徴

Expanded PTFE membrane supports U15 or U16 configurations without an exposed borosilicate fibre surface.

The thin membrane layer provides a favorable pressure-drop profile for high-recirculation cleanroom systems.

Hydrophobic media resists brief moisture exposure and many routine cleanroom decontamination chemicals.

Low-outgassing pack supports, potting and frame materials limit avoidable molecular emissions near process tools.

アプリケーションのソリューション

Ultra-clean semiconductor processes need U-class particle control without adding boron, fibres or excessive recirculation-fan resistance.

Borosilicate media contributes unwanted ionic material near a sensitive process.The ePTFE filtration layer avoids conventional glass-fibre media in the active capture surface.

U-class efficiency consumes too much pressure in a continuously recirculated cleanroom.The high-porosity membrane and optimized pleat area reduce resistance at the selected face velocity.

Fibres released from the downstream face affect optics or wafer surfaces.A supported non-fibrous membrane presents a clean downstream filtration surface.

Filter construction materials add VOCs to a low-outgassing process environment.Selected separators, potting and frame components minimize avoidable material emissions.

典型的な用途

Advanced semiconductor fabricationPhotolithography process baysOLED and flat-panel manufacturingPrecision optics assemblyLow-outgassing equipment mini-environments

技術的なパラメータ

Representative construction ranges for ePTFE membrane ULPA panels are shown below.

コア材料	Supported expanded-PTFE membrane ULPA media with low-outgassing polymer separators
パネルの厚さ	65–150 mm overall aluminium-frame depth
有効幅	305 — 610 mm 公称面幅
最大長さ	1220 mmまでの公称面の長さ
鋼鉄の厚さを直面する	0.4–0.6 mm low-shedding stainless-steel or coated protective grid
コア密度	Approximately 20–35 kg/m³ equivalent ePTFE membrane-pack density
熱伝導率	Approximately 0.030–0.040 W/(m·K) for the dry supported membrane pack
表面仕上げ	Clean natural-anodized aluminium with semiconductor-grade low-shedding faceguards
ジョイントタイプ	Polyurethane gel, closed-cell gasket or extruded knife-edge perimeter seal
カスタマイズ	意図したアプリケーションと動作環境に基づいて利用できます。

利用可能なオプション

U15 or U16 membrane efficiency65 mm, 90 mm or 150 mm frame depthゲル、ガスケットまたはナイフエッジシールLow-outgassing semiconductor component package

Planning a ePTFE Membrane ULPA Filter specification?

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