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Главная / Продукция / Cleanroom Air Filters / Ammonia Removal Filter 592 × 592 × 287 mm Semiconductor AMC
STJH-AMMONIA-AMC-FILTER-592X592X287

Ammonia Removal Filter 592 × 592 × 287 mm Semiconductor AMC

A full-size hybrid-adsorbent module for controlling airborne bases in semiconductor facility air.
  • 2000 cfm facility-air duty
  • Base-target hybrid adsorbent
  • 110 Pa initial resistance
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Введение продукции

This 592 x 592 x 287 mm facility filter is configured around a hybrid chemical adsorbent selected for bases such as ammonia. The 2000 cfm duty and 2.54 m/s reference face velocity suit full-size make-up or return-air banks, while the published 110 Pa initial resistance remains practical for a dedicated AMC stage. Unlike a general activated-carbon filter, this model is directed at base-sensitive processes and must be sized from measured ammonia loading, humidity and the required protection interval.

Основные характеристики

Ammonia-directed media

The hybrid adsorbent chemistry is selected for basic contaminants rather than relying on untreated carbon alone.

Full-module airflow

A 592 mm-square face handles 2000 cfm in a standard full-size chemical-filter bank.

Facility-scale construction

The 287 mm depth provides useful media volume for make-up and recirculation systems protecting sensitive process areas.

Технические параметры

Dimensions592 x 592 x 287 mm
Target ContaminantBases such as ammonia
Rated Airflow2000 cfm
Reference Face Velocity2.54 m/s
Initial Pressure Drop110 Pa at 2.54 m/s
Media TypeApplication-specific hybrid chemical adsorbent blend
Nominal Weight14.5 kg
Installation StageMake-up-air or return-air molecular filter bank
Service BasisContaminant loading and breakthrough monitoring
CustomizationДоступно в зависимости от предполагаемого применения и операционной среды.

Applications

Designed for semiconductor make-up-air and return-air handlers serving ammonia-sensitive lithography, coating and inspection zones. It can also support other controlled processes where airborne bases threaten product yield or optical surfaces, provided media selection follows actual contaminant measurements.

Solutions for Your Application

A broad carbon stage does not hold ammonia long enough to protect a sensitive process.Use the base-target hybrid blend and establish the replacement point from measured inlet and outlet ammonia rather than odor or pressure drop.
The added molecular stage consumes more fan static than the air handler can provide.Check the 110 Pa clean resistance at the stated face velocity and enlarge the active face area when lower system resistance is required.

Доступные варианты

Confirm ammonia concentration, humidity, design airflow, bank dimensions, upstream particle filtration, monitoring method and required change interval.

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