Vacuum pressure controller complete three-quarter view with local HMI, capacitance sensor, motorized throttle valve and process-to-pump flanges

Sistem Utiliti Bilik Bersih

Kawalan Tekanan Vakum

A coordinated closed-loop package that reads absolute pressure from a capacitance sensor and modulates a motorized stainless throttle valve between the process and pump, with local HMI, remote I/O and selectable communications.

Palambalikan penderia kapasitans dengan antaramuka pengguna (HMI) seting tempatan
Injap pendikit hulu bermotor antara proses dan pam
0.1-1000 Torr selectable application span with remote I/O

Permintaan sebut harga Semak imbas produk

Pengenalan Produk

The Vacuum Pressure Controller is a complete pressure-regulation package for an evacuated chamber, tool or clean utility process. The locked catalogue configuration combines one panel-style controller/HMI, one process-side capacitance vacuum sensor, one stainless butterfly throttle valve, one proportional electric actuator/control module, two opposed vacuum interfaces and organized power, sensor, valve and communications wiring on one low mounting base. The sensor returns an absolute-pressure signal to the controller; the controller compares it with the local or remote setpoint and continuously changes valve conductance toward the pump. This architecture supports stable downstream pressure control without changing the upstream gas feed. It is not a read-only vacuum gauge, a manual isolation valve or ID 1926's compressed-air quality monitoring cabinet, and it does not measure oil, particles, dew point or purity.

Ciri-ciri Utama

Kawalan gelung tertutup menyelaras penderiaan tekanan, perbandingan setpoint dan pergerakan injap berkadar dalam satu pakej berfungsi

HMI diterangi tempatan menyediakan tekanan langsung, setpoint, injap-status dan penggera penglihatan pada peralatan

Sensor kapasitans proses-sisi mengukur tekanan mutlak secara berasingan daripada kebanyakan perubahan spesies gas dalam julat yang dipilih

Injap pendikit rama-rama bermotor berbeza-beza mengepam conductance dan bukannya berulang kali menukar pam vakum dan mematikan

Proses berasingan dan bebibir pam membuat arah aliran dan sempadan pemasangan jelas untuk pentauliahan dan perkhidmatan

Komunikasi analog, digital atau rangkaian yang boleh dipilih menyokong setpoints jauh, maklum balas status, interlocks dan kawalan resipi

Penalaan PI/PID boleh dipadankan dengan jumlah ruang, beban gas, conductance injap dan tindak balas pam untuk mengurangkan overshoot dan memburu

Pangkalan tahan karat yang padat menyimpan hubungan pengawal, injap dan sensor tetap sambil membolehkan penghalaan bersih kuasa dan kabel isyarat

Penyelesaian untuk permohonan anda

A pressure-control loop can display a valid reading yet remain unstable if the sensor range, valve conductance, pump speed, control direction or signal wiring is mismatched.

A read-only gauge reports vacuum level but cannot correct pressure drift when gas load or pump conductance changesGunakan gelung maklum balas lengkap supaya pengawal membandingkan tekanan sebenar dengan setpoint dan terus mengarahkan injap pendikit berkadar.

Sensor dengan julat skala penuh yang terlalu tinggi memberikan resolusi yang boleh digunakan di sekitar setpoint operasi yang rendahPilih kapasitansi-manometer skala penuh yang kurungan julat resipi biasa dan rizab ruang kepala yang mencukupi untuk transients dan logik pengekspresian perasaan.

An oversized valve can make small position changes too aggressive, causing hunting and repeated overshootSaiz injap dan mana-mana perkakasan yang mengehadkan konduktor terhadap beban gas, jumlah ruang dan kelajuan pam yang berkesan sebelum menala gelung PI/PID.

Mounting the sensor behind the throttle valve can make the controller regulate pump-side pressure instead of the controlled process volumeLetakkan sensor pada bahagian proses dengan sambungan bersih yang pendek dan berikan proses dan bebibir pam dengan betul semasa pemasangan.

Electrical noise or an incorrect 0-10 V scaling can create a plausible but wrong pressure signalGunakan penghalaan isyarat terlindung, asas biasa, pemetaan berskala penuh yang disahkan dan cek sifar sebelum membolehkan pergerakan injap automatik.

Loss of power or communications can leave an undefined valve position and disturb a sensitive processSpecify the required fail position, hardwired interlocks and recovery sequence, then test them with the actual pump and process equipment.

Permohonan yang biasa

Semiconductor deposition, etch and vacuum process pressure stabilizationPengeringan vakum farmaseutikal dan pemprosesan tekanan rendah terkawalLaboratory chambers, gloveboxes and pilot-scale vacuum equipmentOptical coating, plasma treatment and thin-film process toolsBattery-material drying, degassing and controlled-vacuum enclosuresCleanroom equipment requiring recipe-based downstream absolute-pressure control

Parameter teknikal

The catalogue basis is one MKS 640A / Type 250E-class closed-loop panel package using a local controller/HMI, a process-side capacitance-manometer input and a motorized stainless downstream butterfly valve. The selectable application span is 0.1-1000 Torr across matched sensor and valve configurations; a conservative controller contribution of +/-0.5% of configured full scale is used, while installed loop accuracy and response remain dependent on the ordered sensor, valve, gas load, chamber volume and pump. The standard control signal is 0-10 VDC, with 24 VDC actuator/controller power or an AC-fed panel supply and selectable analog, digital or industrial-network I/O.

Bahan Teras	AISI 316L-class stainless wetted valve and sensor passages, anodized aluminum electronics housings, and process-selected elastomer sealing
Ketebalan Panel	2.0 mm nominal stainless mounting panel or base plate for the packaged controller assembly
Lebar berkesan	80 mm nominal DN80 downstream throttle-valve bore in the illustrated configuration
Panjang maksimum	Up to 500 mm representative process-to-pump package envelope before external field cabling
Keluli Menghadapi Ketebalan	0 mm separate steel facing; the vacuum flow hardware uses solid machined stainless components
Ketumpatan teras	Approximately 8000 kg/m³ representative density for AISI 316L stainless vacuum hardware
Kekonduksian Terma	Approximately 15 W/(m·K) near 20°C for representative AISI 316L stainless components
Kemasan permukaan	Natural neutral-silver stainless valve and sensor surfaces with machined sealing faces; dark blue-gray coated controller and actuator housings
Jenis Bersatu	Two opposing ISO-F DN80 vacuum flange interfaces for process and pump connections, with separate sealed sensor and electrical connectors
Penyesuaian	Boleh didapati berdasarkan aplikasi yang dimaksudkan dan persekitaran operasi.

Pilihan yang boleh didapati

Capacitance-manometer full scales selected around the normal control setpointUpstream proportioning-valve or downstream throttle-valve control architectureDN40, DN63, DN80 or application-sized vacuum connections and valve conductanceFKM, FFKM or process-qualified alternative seal compoundsLocal panel HMI, remote rack controller or integrated valve-controller format0-10 V analog, digital I/O, RS232, RS485, Ethernet or selected industrial fieldbus communicationNormally open, normally closed or powered fail-position strategy where supportedPrewired stainless base, enclosure or equipment-frame integration with labelled field terminals

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